• 专利标题:   Device for producing graphene heterojunction by chemical vapor deposition, comprises vertically movable upper heater, lower heater, support frame arranged on lower heater, tray arranged on side of support frame and suspension catalyst unit.
  • 专利号:   CN110042368-A, CN210314482-U
  • 发明人:   KONG W, ZHAO Y
  • 专利权人:   HEFEI ORIGIN QUANTUM COMPUTATION TECHNOL
  • 国际专利分类:   C23C016/26, C23C016/458, C23C016/48
  • 专利详细信息:   CN110042368-A 23 Jul 2019 C23C-016/48 201960 Pages: 13 Chinese
  • 申请详细信息:   CN110042368-A CN10397618 14 May 2019
  • 优先权号:   CN10397618, CN20688380

▎ 摘  要

NOVELTY - Device comprises vertically movable upper heater (1), liftable lower heater (2) arranged in a vertical direction, support frame (3) fixedly arranged on the lower heater and located between the lower heater and the upper heater, tray (4) arranged on a side of the support frame away from the lower heater for carrying a substrate, and a suspension catalyst unit (6) for providing a catalyst directly above the substrate. The size of the cross section of the support frame parallel to the lower heater and the tray is gradually reduced from the lower heater to the tray. The surface of tray for carrying the substrate is higher than the support frame. The support frame is electrically conductive, and the substrate is electrically connected to the support frame through conductive wires embedded in the tray. USE - Device for producing graphene heterojunction by chemical vapor deposition. ADVANTAGE - The device improves the quality assurance of graphene heterojunction. DESCRIPTION OF DRAWING(S) - The drawing shows schematic representation of device for producing graphene heterojunction. Upper heater (1) Lower heater (2) Support frame (3) Tray (4) Suspension catalyst unit (6)