▎ 摘 要
NOVELTY - The method involves passivating a bio-compatible microbial cellulose membrane (30) with an atomic layer deposition (ALD) of dielectric, or with a bio-compatible polymer. A graphene is transferred over the passivated bio-compatible microbial cellulose membrane. The transferred graphene is patterned. The patterned graphene is etched to form a graphene mesa structure. Ohmic contacts are formed on the graphene mesa structure for source and drain electrodes. The bio-compatible microbial cellulose membrane is released from a handling wafer. USE - Method for fabricating a graphene-based neuroelectric sensor for stimulating and monitoring brain activity. ADVANTAGE - The method enables greatly reducing a data communication bandwidth and simplifies an external reader requirement, and ensures that wireless power rectification efficiency can be drastically improved as a voltage drop across a rectifier is reduced in half. DETAILED DESCRIPTION - The handling wafer is silicon or glass. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a high sensitivity, ultra-low power, and high speed graphene FET sensor for neural activity. Graphene-based neuroelectric sensors (22) Bio-compatible microbial cellulose membrane (30)