▎ 摘　　要

NOVELTY - Release of graphene layer (114) from a template substrate (112) on which the graphene layer is provided, involves subjecting the graphene layer and the template substrate to a water treatment by soaking the graphene layer and the template substrate in water such that water is intercalated between the template substrate and the graphene layer, and subjecting the graphene layer and the template substrate to a delamination process. USE - Release of graphene layer from template substrate, used for circuits and devices. ADVANTAGE - The method is reliable and efficiently releases graphene layer from template substrate. The intercalated water reduces the risk of damaging graphene during the delamination process. The soaking allows the intercalated water to form along the entire interface between the graphene layer and the template layer. The method does not require any additional temporary handling wafer between the delamination process and the transfer and bonding, thus reducing the risk of contaminating the graphene layer during processing. The method enables reuse of the template substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view explaining the method for releasing the graphene layer from the template substrate and directly transferring and bonding the graphene layer to the target substrate. Template substrate (112) Graphene layer (114)