• 专利标题:   Graphene-based electromechanical switch, has flexible conductive element separated from material by gap, where gap is sized to create negative threshold voltage at gate material for opening circuit.
  • 专利号:   US8735947-B1, US2014151786-A1
  • 发明人:   GUO D, HAN S, LIU F, WONG K K H, YUAN J
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   G01C019/00, H01L029/49, H01L029/78
  • 专利详细信息:   US8735947-B1 27 May 2014 G01C-019/00 201440 Pages: 11 English
  • 申请详细信息:   US8735947-B1 US693285 04 Dec 2012
  • 优先权号:   US693285

▎ 摘  要

NOVELTY - The switch has gate material (104) formed in a recess of a substrate (102). A flexible conductive element disposed above the gate material, is separated from the material by gap. The element is supported on two points across the gap. Voltage above gate threshold voltage causes deformation in the element such that the element contacts with a drain in the substrate, to close a circuit between the drain and a source terminal. The gap separating the element and the gate material is sized to create negative threshold voltage at the gate material for opening the circuit. USE - Graphene-based electromechanical switch. ADVANTAGE - The gap separating the element and the gate material is sized to create negative threshold voltage at the gate material for opening the circuit to achieve non-volatility such that state of the switch is maintained without expending additional energy. The irregularities in the surfaces of the switch increase the surface area, thus allowing flexible material such as graphene to experience higher attractive force. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a graphene-based electromechanical switch. Graphene-based electromechanical switch (100) Substrate (102) Gate material (104) Source contact (108) Drain contact (110)