• 专利标题:   Preparing graphene glass involves cleaning glass substrate with hydrochloric acid, acetone, isopropanol, ethanol and pure water, ultrasonically cleaning, using inert gas and nitrogen, drying, and placing in high-temperature tubular furnace.
  • 专利号:   CN112919823-A
  • 发明人:   XING F, LI Z, WU T, HAN X, JI G, TIAN J
  • 专利权人:   UNIV SHANDONG TECHNOLOGY
  • 国际专利分类:   C03C017/22
  • 专利详细信息:   CN112919823-A 08 Jun 2021 C03C-017/22 202151 Pages: 10 Chinese
  • 申请详细信息:   CN112919823-A CN10233075 03 Mar 2021
  • 优先权号:   CN10233075

▎ 摘  要

NOVELTY - Preparing graphene glass comprises (i) cleaning the glass substrate, respectively placing the glass substrate in hydrochloric acid, acetone, isopropanol, ethanol, pure water environment for ultrasonic cleaning, using inert gas (like argon gas, nitrogen and so on) drying, (ii) placing cleaned glass substrate in the high temperature tubular furnace, where the temperature of the furnace reaches 900-1150 degrees C, using oil-free vacuum dry pump to empty the gas in the pipe, pumping to the vacuum degree, cleaning the whole gas circuit with argon of 300-500 sccm flow, (iii) closing argon, introducing reducing gas argon/hydrogen mixed gas, taking the other argon gas as carrier gas carrying alcohol carbon source into the tubular furnace for growth of graphene film on the glass substrate, (iv) orderly closing the carbon source gas, reducing gas, introducing inert carrier gas to the chamber pressure to room pressure, growing temperature is gradually reduced to room temperature. USE - The method is useful for preparing large-area graphene glass. ADVANTAGE - The method enables preparation of graphene glass with improved growth speed, uniform film, controllable thickness, and is suitable for large scale production.