• 专利标题:   Low temperature polycrystalline silicon thin film transistor of array substrate used in display panel of LCD, has graphene oxide layer which is arranged between active layer and gate insulating layer.
  • 专利号:   CN205092247-U
  • 发明人:   ZHANG S, ZHAN Y
  • 专利权人:   BOE TECHNOLOGY GROUP CO LTD
  • 国际专利分类:   H01L021/336, H01L027/12, H01L029/786
  • 专利详细信息:   CN205092247-U 16 Mar 2016 H01L-029/786 201623 Pages: 15 English
  • 申请详细信息:   CN205092247-U CN20875410 05 Nov 2015
  • 优先权号:   CN20875410

▎ 摘  要

NOVELTY - The utility model claims display technology area, and claims a kind of low temperature polycrystalline silicon thin film transistor, array substrate and display panel. The low temperature polycrystalline silicon thin film transistor comprises: including set up on substrate of the active region layer, source electrode, drain electrode, grid electrode, the active region layer and the grid insulation layer, and is set with the oxidation graphene in between the active region layer and the grid insulation layer between the grid electrode. By oxidation graphene formed in between active region layer and grid insulation layer, reduce polysilicon between active region layer and grid insulation layer surface roughness and surface defect state density, and no need for gate insulation layer prevention cleaning process. Also claims of including array placode and displaying panel and the polycrystalline silicon thin film transistor.