• 专利标题:   Fast chemical vapor deposition growth of single-layer graphene on non-metallic substrates comprises e.g. raising non-metallic substrate to growth temperature in non-oxidizing atmosphere, and charging reaction system with carbon source.
  • 专利号:   CN111517307-A
  • 发明人:   MA L, WEI S, REN W, CHENG H
  • 专利权人:   INST METAL RES CHINESE ACAD SCI
  • 国际专利分类:   C01B032/186, C23C016/26
  • 专利详细信息:   CN111517307-A 11 Aug 2020 C01B-032/186 202069 Pages: 9 Chinese
  • 申请详细信息:   CN111517307-A CN10104981 01 Feb 2019
  • 优先权号:   CN10104981

▎ 摘  要

NOVELTY - Fast chemical vapor deposition growth of single-layer graphene on non-metallic substrates comprises (1) raising non-metallic substrate to a growth temperature of 900-1200 degrees C in a non-oxidizing atmosphere, and maintaining for /(1 minute to form a reaction system, (2) unchanging temperature, and charging the reaction system with carbon source, hydrogen, carrier gas, and water vapor, using chemical vapor deposition technology, the processed substrate reactive growth of graphene on the upper, the growth temperature is 900-1200 degrees C, and the growth time is 20-60 minutes, and (3) after completing reaction, the carbon source and water vapor are turning off and cooling under protection of an inert atmosphere to obtain a single-layer graphene. USE - The method is useful for fast chemical vapor deposition growth of single-layer graphene on non-metallic substrates. ADVANTAGE - The method: reduces defect structure of graphene, improves growth rate of graphene, and avoids adverse effect of conventional transfer process on performance of graphene device.