• 专利标题:   Graphene/palladium diselenide/silicon heterojunction self-driven photoelectric detector, has graphene layer, palladium diselenide layer, and silicon substrate corresponding to silicon window unit that form heterojunction.
  • 专利号:   CN111341875-A
  • 发明人:   LI Y, HE T, LAN C, LI C
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   H01L031/032, H01L031/0352, H01L031/109, H01L031/18
  • 专利详细信息:   CN111341875-A 26 Jun 2020 H01L-031/109 202057 Pages: 11 Chinese
  • 申请详细信息:   CN111341875-A CN10164766 11 Mar 2020
  • 优先权号:   CN10164766

▎ 摘  要

NOVELTY - The detector comprises a silicon substrate and a silicon dioxide layer (4). The silicon dioxide layer includes a silicon window unit, and a ring of electrodes is arranged on the silicon dioxide layer on the periphery of the silicon window unit. A palladium diselenide layer (2) covers the surface of the silicon window unit. A graphene layer (1) covers the surface of the area surrounded by the silicon window unit and its corresponding electrodes that are covered with a palladium diselenide layer. The graphene layer, the palladium diselenide layer, and the silicon substrate corresponding to the silicon window unit form a graphene/palladium diselenide/silicon heterojunction. The electrode corresponding to the silicon window unit serves as an output. The graphene/palladium diselenide/silicon heterojunction self-driven photodetector is formed. USE - Graphene/palladium diselenide/silicon heterojunction self-driven photoelectric detector. ADVANTAGE - The preparation method is simple. The device is featured with self-driving property, high responsivity and other excellent performance in the visible-near infrared light band. DESCRIPTION OF DRAWING(S) - The drawing shows a side view of the device structure of the graphene/palladium diselenide/silicon heterojunction self-driven photoelectric detector. Graphene layer (1) Palladium selenide layer (2) Gold electrode layer (3) Silicon dioxide layer (4) N-type silicon substrate (5)