• 专利标题:   Graphene based nano-electromechanical resonator preparation method, involves coating protective glue on surface of sample, corroding part of insulation substrate on lower part of graphene film layer, and corroding protective glue.
  • 专利号:   CN102315831-A, CN102315831-B
  • 发明人:   FAN K, JI X, NIU X, WANG W
  • 专利权人:   UNIV XIDIAN
  • 国际专利分类:   H03H003/02
  • 专利详细信息:   CN102315831-A 11 Jan 2012 H03H-003/02 201211 Pages: 9 Chinese
  • 申请详细信息:   CN102315831-A CN10114630 04 May 2011
  • 优先权号:   CN10114630

▎ 摘  要

NOVELTY - The method involves depositing catalyst i.e. copper or nickel, to a surface of an insulation substrate i.e. silicon dioxide or silicon substrate. A graphene film layer is printed to another insulation substrate through a pattern printing process. Metal material is formed into a source electrode and a drain electrode through a metal evaporation technique. A surface of a sample is rotationally coated with protective glue. A part of the latter insulation substrate is corroded on a lower part of the graphene film layer to form a channel. The protective glue is corroded. USE - Graphene based nano-electromechanical resonator preparation method. ADVANTAGE - The method ensures better electric property and mechanical property of a nano-electro-mechanical resonator. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of a graphene based nano-electromechanical resonator.