▎ 摘　　要

NOVELTY - The modulator has a silicon waveguide transmission layer (2) formed on a sapphire substrate (1). A first graphene layer (3) is located on one side of the silicon wave guide transmission layer. A second graphene layer control electrode (7) is arranged and connected on a second graphene layer (6). A sulfur-based strip waveguide (8) is formed on the second graphene layer, comprises a chalcogenide cover layer which is formed on a chalcogenide medium layer and is coated with a second graphene layer and chalcogenide strip waveguide. USE - Hybrid waveguide integrated graphene infrared electro-optic modulator for chemical gas sensing, biological information sensing, thermal imaging, red external resistance, free space communication, wind direction tracking and precise surgery. ADVANTAGE - The modulator with strong light and material interaction based on sapphire-silicon-chalcogenide glass-graphene supporting TEO mode optical signal transmission and modulating is provided. The low power consumption modulation is realized. The high carrier mobility of graphene is used to achieve ultra-high speed modulation. The light power consumption is reduced. The modulation speed is improved in the current 3-5 m wave band. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the hybrid waveguide integrated graphene infrared electro-optic modulator. 1Sapphire substrate 2Silicon waveguide transmission layer 3First graphene layer 4First graphene layer control electrode 5Chalcogenide medium layer 6Second graphene layer 7Second graphene layer control electrode 8Chalcogenide waveguide 9Chalcogenide cover layer 10Through hole electrode