• 专利标题:   Bolometer, has thermistor material formed with graphite laminated structure, and infrared thermal laminating film formed with three layers of graphene material that is coated on two sides of thermistor material.
  • 专利号:   CN205940776-U
  • 发明人:   WEI X, YANG J, TANG L, SHEN J, ZHOU D, FENG S, LU S, SHI H, DU C
  • 专利权人:   CHINESE ACAD SCI CHONGQING GREEN INTEL
  • 国际专利分类:   G01J005/20
  • 专利详细信息:   CN205940776-U 08 Feb 2017 G01J-005/20 201715 Pages: 7 Chinese
  • 申请详细信息:   CN205940776-U CN20760607 19 Jul 2016
  • 优先权号:   CN20760607

▎ 摘  要

NOVELTY - This utility model is relates to a bolometer, comprising a micro radiation heat of the uncooled infrared detector from the bridge structure, comprising a top silicon nitride, the top nitride downwardly is infrared thermal laminating film, silicon nitride supporting layer; silicon nitride support layer and the reflecting layer are connected through supporting pier form a resonant cavity, the metal reflecting layer is on the silicon substrate; the infrared thermal laminating film is laminated structure composed of thermistor material and graphene material structure, the infrared thermal laminating film comprising one to three layers of graphene material. and graphene material at the upper and lower two sides are thermistor material. the micro-detect radiation heat meter capable of broad-band infrared absorption is enhanced, so as to improve the infrared absorptivity and detection sensitivity of the device, simple device structure, compatible with MEMS technology, and it is suitable for mass production.