▎ 摘 要
NOVELTY - This utility model is relates to a bolometer, comprising a micro radiation heat of the uncooled infrared detector from the bridge structure, comprising a top silicon nitride, the top nitride downwardly is infrared thermal laminating film, silicon nitride supporting layer; silicon nitride support layer and the reflecting layer are connected through supporting pier form a resonant cavity, the metal reflecting layer is on the silicon substrate; the infrared thermal laminating film is laminated structure composed of thermistor material and graphene material structure, the infrared thermal laminating film comprising one to three layers of graphene material. and graphene material at the upper and lower two sides are thermistor material. the micro-detect radiation heat meter capable of broad-band infrared absorption is enhanced, so as to improve the infrared absorptivity and detection sensitivity of the device, simple device structure, compatible with MEMS technology, and it is suitable for mass production.