• 专利标题:   Doping of graphene and nanotube thin-film field-effect transistor device for electronic device, involves selectively applying dopant to channel region of thin-film field-effect transistor device to improve electronic mobility.
  • 专利号:   US2013137248-A1, US8772141-B2
  • 发明人:   AFZALIARDAKANI A, CHANDRA B, TULEVSKI G S
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   B82Y040/00, H01L021/04
  • 专利详细信息:   US2013137248-A1 30 May 2013 H01L-021/04 201337 Pages: 15 English
  • 申请详细信息:   US2013137248-A1 US627020 26 Sep 2012
  • 优先权号:   US306357, US627020

▎ 摘  要

NOVELTY - A dopant is selectively applied to a channel region of a graphene or nanotube thin-film field-effect transistor device to improve electronic mobility of field-effect transistor device. Thus, graphene and nanotube thin-film field-effect transistor device is doped. USE - Doping of graphene and nanotube thin-film field-effect transistor device used for electronic device. ADVANTAGE - The doping of graphene and nanotube thin-film field-effect transistor device is enabled with improved electronic mobility. The tube resistance and flake resistance of transistor device are reduced. The dopant molecule forms thick layer and electron transmission is prevented from metal. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic view of dual-gate carbon nanotube thin-film field-effect transistor device. Gate (100) Gate electric (120) Carbon nanotube or carbon nanotube film (140) Metal portions (162,164) Gated undoped region (500)