• 专利标题:   Graphene imaging method, involves transferring large area graphene film to imaged substrate with groove from solution, and breaking graphene in groove area via surface tension of solution to obtain required imaged graphene.
  • 专利号:   CN102263013-A, CN102263013-B
  • 发明人:   LI T, WANG W, WANG Y
  • 专利权人:   CHINESE ACAD SCI SHANGHAI MICROSYSTEMS, CHINESE ACAD SCI SHANGHAI INST MICROSYST
  • 国际专利分类:   H01L021/02
  • 专利详细信息:   CN102263013-A 30 Nov 2011 H01L-021/02 201202 Pages: 8 Chinese
  • 申请详细信息:   CN102263013-A CN10218695 01 Aug 2011
  • 优先权号:   CN10218695

▎ 摘  要

NOVELTY - The method involves forming a groove on a substrate to form a required image via deep reaction ion etching, micro cutting technique and wet corroding technique, where depth and width ratio of the groove is greater than 1.1. Large area graphene film is prepared. The graphene film is moved in solution. The large area graphene film is transferred to the imaged substrate with groove from the solution. The substrate and graphene are dryed. The graphene in the groove area is boken via a surface tension of the solution to obtain the required imaged graphene. USE - Graphene imaging method. ADVANTAGE - The method enables accurately determining a position of the imaged graphene on the substrate without performing photolithography on the graphene so as to avoid damaging of crystal lattice quality of the graphene. The method enables performing graphene imaging process at low cost. The method enables easily positioning the graphene without pollution. DETAILED DESCRIPTION - The substrate is silicon piece, monox piece, ceramic, and glass piece. The solution is deionized water, alcohol, acetone, carbontetrachloride and isopropanol. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a graphene imaging method.'(Drawing includes non-English language text)'