• 专利标题:   Producing polymer-coated graphene layer structure involves e.g. adding substrate to reaction chamber, supplying flow comprising precursor compound to form graphene layer structure, heating and spin-coating using polymer or polymer precursor.
  • 专利号:   WO2021008938-A1, GB2585843-A, TW202106619-A, TW737387-B1, CN114174222-A, DE112020003405-T5, GB2585843-B, US2022290296-A1
  • 发明人:   GLASS H, GUINEY I, TYLER M, WALLIS R, THOMAS S, TAYLOR M
  • 专利权人:   PARAGRAF LTD, PARAGRAF LTD
  • 国际专利分类:   B82Y030/00, B82Y040/00, C01B032/182, C01B032/186, H01L029/16, C23C016/26, C23C016/56, H01L031/18, C01B032/184, C01B032/194, H01L043/14, H01L033/56
  • 专利详细信息:   WO2021008938-A1 21 Jan 2021 202110 Pages: 31 English
  • 申请详细信息:   WO2021008938-A1 WOEP069083 07 Jul 2020
  • 优先权号:   GB010192, CN80050450

▎ 摘  要

NOVELTY - Producing (M1) a polymer-coated graphene layer structure, comprises: providing substrate on a heated susceptor to reaction chamber having many cooled inlets arranged so that the inlets are distributed across the substrate in use and have constant separation from the substrate; supplying flow comprising precursor compound through the inlets and into the reaction chamber to decompose precursor compound and forms graphene layer structure on the substrate, where the inlets are cooled to less than 100 degrees C and heating the susceptor to at least 50 degrees C in excess of decomposition temperature of the precursor, where the graphene layer structure has first charge carrier density; and spin-coating composition onto the graphene layer structure to obtain air-impermeable coating, where the coated graphene layer structure has second charge carrier density which is less than the first charge carrier density, and the composition comprises polymer or polymer precursor. USE - The method is useful for producing polymer-coated graphene layer structure. ADVANTAGE - The method provides graphene layer structure with a reduced charge carrier density through the application of a polymer-coating having a complementary charge carrier density that dopes the graphene layer structure upon which it is deposited. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for: (1) graphene layer structure having air-impermeable coating, and charge carrier density of less than 1x 1012 cm-2, preferably less than or equal to 5x 1011 cm-2; (2) producing (M2) many polymer-coated graphene layer structures having target charge carrier density, comprising (a) coating graphene layer structure on a first substrate, the graphene layer structure having first charge carrier density, (b) determining the first charge carrier density of the graphene layer structure, (c) spin-coating composition onto the graphene layer structure to form air-impermeable coating, where the components and their concentrations in the composition are selected so as to provide polymer-coated graphene layer structure having second charge carrier density, where the second charge carrier density is 10% of the targeted charge carrier density, and (d) repeating the steps (a) and (c) to provide many polymer-coated graphene layer structures on many corresponding substrates without determining the charge carrier density of each graphene layer structure; and (3) producing (M3) polymer-coated graphene layer structure having charge carrier density of 1x 1013-8x 1013 cm-2, comprising (i) providing graphene layer structure having first charge carrier density on a substrate, (ii) determining the first charge carrier density of the graphene layer structure, and (iii) spin-coating composition onto the graphene layer structure to form air-impermeable coating, where the composition is selected to increase the first charge carrier density of the graphene layer structure and provide the polymer-coated graphene layer structure.