• 专利标题:   Semiconductor device for field effect transistor, has gate electrode provided on surface of graphene layer, source electrode arranged between drain electrodes, and graphene layer provided on surface of main body.
  • 专利号:   JP2016058450-A, JP6461523-B2
  • 发明人:   SUEMITSU M, FUKIDOME H, TATENO Y
  • 专利权人:   SUMITOMO ELECTRIC IND LTD, UNIV TOHOKU
  • 国际专利分类:   H01L021/28, H01L021/336, H01L029/417, H01L029/423, H01L029/49, H01L029/786, H01L051/05, H01L051/30
  • 专利详细信息:   JP2016058450-A 21 Apr 2016 H01L-029/786 201630 Pages: 13 English
  • 申请详细信息:   JP2016058450-A JP181576 05 Sep 2014
  • 优先权号:   JP181576

▎ 摘  要

NOVELTY - The device has a graphene layer (12) arranged on a SiC layer (11), where a surface (34) of the graphene layer is formed on a source electrode (24) and a drain electrode (26). The gate electrode is provided on the surface of the graphene layer. The source electrode is arranged between the drain electrodes. The graphene layer is provided on a surface (36) of a main body. A gate insulating film (14) is arranged on an aluminum oxide film (16) that is provided between the graphene layer and the gate electrode. USE - Semiconductor device for a field effect transistor. ADVANTAGE - The source electrode is arranged between the drain electrodes and the graphene layer is provided on the surface of the main body, so that performance of the device can be improved. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a field effect transistor. SiC layer (11) Graphene layer (12) Gate insulating film (14) Aluminum oxide film (16) Source electrode (24) Drain electrode (26) Surface of graphene layer (34) Surface of main body (36)