• 专利标题:   Preparing graphene nanobelt comprises polishing and cleaning a silicon carbide substrate, carrying out hydrogen etching, heating etched step-shaped silicon carbide substrate, and carrying out helium ion etching.
  • 专利号:   CN103935990-A, CN103935990-B
  • 发明人:   LI Y, WANG Q, ZHU J, REN N, WANG W, SHAO Y, ZHANG T
  • 专利权人:   UNIV JIANGSU
  • 国际专利分类:   B82Y040/00, C01B031/04
  • 专利详细信息:   CN103935990-A 23 Jul 2014 C01B-031/04 201468 Pages: 7 Chinese
  • 申请详细信息:   CN103935990-A CN10148721 15 Apr 2014
  • 优先权号:   CN10148721

▎ 摘  要

NOVELTY - Preparing graphene nanobelt comprises (1) polishing and cleaning a silicon carbide substrate to obtain a uniform flat and step-shaped silicon carbide substrate, (2) carrying out hydrogen etching of the uniform flat and step-shaped silicon carbide substrate to remove corrosion and obtain step-shaped silicon carbide substrate with surface roughness less than 0.2 nm, (3) heating the etched step-shaped silicon carbide substrate to grow graphene on the substrate, and (4) carrying out helium ion etching of the step-shaped silicon carbide substrate using a focused ion beam system. USE - The method is useful for preparing graphene nanobelt (claimed). ADVANTAGE - The method is capable of accurately and uniformly preparing the graphene nanobelt with high sensitivity and good contrast. DETAILED DESCRIPTION - Preparing graphene nanobelt comprises (1) polishing and cleaning a silicon carbide substrate to obtain a uniform flat and step-shaped silicon carbide substrate, (2) carrying out hydrogen etching of the uniform flat and step-shaped silicon carbide substrate to remove corrosion and obtain step-shaped silicon carbide substrate with surface roughness of less than 0.2 nm, (3) heating the etched step-shaped silicon carbide substrate to grow graphene on the substrate, and (4) carrying out helium ion etching of the step-shaped silicon carbide substrate for growing graphene for 1-100 mu s, using a focused ion beam system having 20 keV of ion energy level, 1-10 pA of ion beam electric current and vacuum pressure of 10-6 Torr to obtain graphene nanobelt with line width of less than 10 nm.