• 专利标题:   Compensation graphene pressure sensor, has detection unit including force-sensitive nano-film and temperature-sensitive nano-film that are connected to external detection component through electrode.
  • 专利号:   CN107436205-A, CN207197705-U
  • 发明人:   LI M, ZHAO S, OH S, WANG L, WANG J
  • 专利权人:   UNIV NORTH CHINA
  • 国际专利分类:   G01L001/18, G01L001/26, G01L019/04, G01L009/00, G01L009/06
  • 专利详细信息:   CN107436205-A 05 Dec 2017 G01L-001/18 201804 Pages: 11 Chinese
  • 申请详细信息:   CN107436205-A CN10693620 14 Aug 2017
  • 优先权号:   CN10693620, CN21013476

▎ 摘  要

NOVELTY - The sensor has a detection unit that is provided in an internal detection space. The detection unit has a force-sensitive nano-film (3) and a temperature-sensitive nano-film (4) that is arranged on a side surface of a substrate (7) facing the internal detection space provides a boss structure arranged on a lower side of the temperature-sensitive nano-film and in contact with the temperature-sensitive nano-film. The force-sensitive nano-film and the temperature-sensitive nano-film are connected to an external detection component through an electrode (1). USE - Compensation graphene pressure sensor. ADVANTAGE - The ambient interference factors in the environment can be effectively eliminated. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the compensation graphene pressure sensor. (Drawing includes non-English language text) Electrode (1) Force-sensitive nano-film (3) Temperature-sensitive nano-film (4) Substrate (7) Sealing ring (8)