▎ 摘 要
NOVELTY - The humidity sensor has graphene based humidity sensitive film (4) that is composed of static induced self-assembly polyelectrolyte precursor and solvent evaporation induced self-assembly graphene film, and mounted on surfaces of flexible polymer substrate (5) and comb-like interdigital electrode (6) to form humidity sensitive film sensing element. The film resistor pickup circuit (9) and humidity sensitive element are electrically connected together through contact pin (7) to measure humidity change by detecting thin film resistive value. USE - Graphene film humidity sensor. ADVANTAGE - The stability and reliability of the humidity sensor can be improved. The manufacturing cost of the humidity sensor can be reduced. The high sensitivity of the humidity sensor can be achieved. The repeatability of the humidity sensor can be improved. The high speed of humidity sensitive response and recovery can be improved. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the graphene film humidity sensor. Graphene based humidity sensitive film (4) Flexible polymer substrate (5) Comb-like interdigital electrode (6) Contact pin (7) Film resistor pickup circuit (9)