• 专利标题:   Preparing graphene electro conductive thin film involves depositing nickel layer on glass substrate by performing magnetron sputtering and depositing graphene by chemical vapor deposition.
  • 专利号:   CN105931758-A
  • 发明人:   HE J
  • 专利权人:   CHENGDU TIANHANG ZHIHONG CORP MANAGEMENT
  • 国际专利分类:   C01B031/04, H01B013/00, H01B005/14
  • 专利详细信息:   CN105931758-A 07 Sep 2016 H01B-013/00 201677 Pages: 7 Chinese
  • 申请详细信息:   CN105931758-A CN10465355 24 Jun 2016
  • 优先权号:   CN10465355

▎ 摘  要

NOVELTY - Preparing graphene electro conductive thin film involves depositing nickel layer of thickness 1-3 atoms thickness on the glass substrate by performing magnetron sputtering at substrate temperature of 50-85 degrees C, vacuum degree of 1x 10-5-1x 10-4 and pressure of 1-5 pascals. Graphene is deposited by chemical vapor deposition forming film layer of thickness 50-100 mu m. The graphene and nickel coated glass substrate is cooled down to room temperature. The graphene film layer is washed to remove the surface nickel film layer and then dried. USE - Method for preparing graphene electro conductive thin film (claimed). ADVANTAGE - The method enables efficient preparation of graphene electro conductive thin film in cost effective manner.