• 专利标题:   Synthesizing two-dimensional transition metal oxide layers by providing sputter chamber having inert atmosphere, depositing transition metal on substrate in sputter chamber, withdrawing substrate from chamber, placing substrate on pre-heated plate, and placing target substrate on ceramic plates.
  • 专利号:   IN202241005220-A, IN427455-B
  • 发明人:   DASH J K, ABZAL S M, KALYAN K, JANGA S L
  • 专利权人:   UNIV SRM
  • 国际专利分类:   B01J023/755, C23C014/08, C30B025/18, C30B029/02, C30B029/60
  • 专利详细信息:   IN202241005220-A 11 Feb 2022 C23C-014/08 202224 Pages: 31 English
  • 申请详细信息:   IN202241005220-A IN41005220 31 Jan 2022
  • 优先权号:   IN41005220

▎ 摘  要

NOVELTY - Method for synthesizing two-dimensional transition metal oxide layers, involves (a) providing a sputter chamber having a predetermined base pressure and having an inert atmosphere, (b) depositing a transition metal on a substrate in the sputter chamber to obtain a sputter deposited transition metal film on the substrate, (c) withdrawing the substrate from the sputter chamber, (d) placing the substrate on a pre-heated plate having at least two ceramic plates, and the substrate is placed between the ceramic plates, (e) placing at least one target substrate on the ceramic plates with its operative surface towards the substrate at a second pre-determined distance, (f) reacting the transition metal film from the substrate with atmospheric oxygen to obtain at least one transition metal oxide layer on the substrate, and (g) subliming the transition metal oxide layer from the substrate followed by depositing on the target substrate to obtain the two-dimensional transition metal oxide layers. USE - The method is useful for synthesizing two-dimensional transition metal oxide layers used in two-dimensional transition metal oxide sheet. ADVANTAGE - The method is simple, economical and environmentally-friendly, and the formed layers have excellent texture having nearly single crystalline large grains, and the optical and structural analysis reveals that the grown transition metal oxide layers have high crystallinity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a two-dimensional transition metal oxide sheet formed by the above-mentioned two-dimensional transition metal oxide layers, or a two-dimensional transition metal oxide sheet, where the transition metal is molybdenum, and the sheet is a two-dimensional alpha -phase-molybdenum trioxide sheet, and the Raman spectra of alpha -phase-molybdenum trioxide sheet demonstrate peaks at 820-998/cm.