▎ 摘　　要

NOVELTY - The pipe (100) comprises a planar heating element provided to surround a perimeter of a pipe (110,140) and uniformly heating the pipe to a preset temperature. A terminal portion is provided on the planar heat element (120) to apply power to the heating element. A heating element pattern layer is formed on a surface of an insulating protective sheet and electrically connected to the terminal portion. Another insulating protection sheet is arranged in close contact with the surface of the former protective sheet to cover and protect the pattern layer. The heating element is made of nano-carbon material such as carbon nanotube or graphene. USE - Heating pipe for use in a chemical vapor deposition facility during semiconductor manufacturing process. ADVANTAGE - The heating performance of the planar heating element is appropriately adjusted according to the position by changing the pattern interval or pattern shape of the heating element pattern layer. The occurrence of cold spots in the heating pipe is effectively prevented by heating the area where cold spots are occurred in the pipe to a relatively higher temperature. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view showing a heating pipe using a planar heating element. Pipe (100) Pipe (110,140) Planar heat element (120) Insulating Material (150)