▎ 摘 要
NOVELTY - The field emission element (10) has an emitter (12) that is provided with a pointed tip formed on a substrate (11). A gate electrode (15) having an opening portion (15a) exposes the tip of the emitter formed on the substrate via an insulating layer (13,14). The gate electrode comprises a polycrystalline, multilayer graphene film. USE - Field emission element. ADVANTAGE - A field emission element is capable of avoiding discharge between an emitter and a gate electrode, thus suppressing adverse effect on other field emission elements even when discharge is caused. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method of field emission element. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a field emission element. 10Field emission element 11Substrate 12Emitter 13,14Insulating layer 15Gate electrode 15aOpening portion