• 专利标题:   Sensor useful for measuring physical quantities e.g. pressure and strain, has polyimide film layer, silver electrode layer, graphene and graphene oxide composite thin film layer and graphene oxide thin film insulating protective layer.
  • 专利号:   CN106595916-A
  • 发明人:   WU X, LIU S, ZHANG D, GUO C, XIE X, WU J, WANG Q
  • 专利权人:   UNIV EAST CHINA NORMAL
  • 国际专利分类:   G01L001/22
  • 专利详细信息:   CN106595916-A 26 Apr 2017 G01L-001/22 201738 Pages: 9 Chinese
  • 申请详细信息:   CN106595916-A CN11094368 02 Dec 2016
  • 优先权号:   CN11094368

▎ 摘  要

NOVELTY - A carbon-based flexible pressure sensor has a four-layer film structure including a flexible polyimide film layer, a silver electrode layer, a flexible graphene and graphene oxide composite thin film layer and a graphene oxide thin film insulating protective layer. The polyimide film layer has a thickness of 20-200 mu m. The silver electrode layer has a thickness of 500 nm to 5 mu m, is formed on the polyimide film layer. The flexible graphene and graphene oxide composite thin film layer has a thickness of 50-600 mu m and a honeycomb porous layered structure. USE - Carbon-based pressure sensor is useful for measuring physical quantities such as pressure and strain. ADVANTAGE - The carbon-based pressure sensor has high flexibility and sensitivity, can normally work in any state of bending at any angle, measures up to 10 kHz dynamic high-frequency pressure signal, can be prepared in a simple and economical manner with high resolution and ultra-fast dynamic response, stability and quality and reduced equipment consumption, and is suitable for wearable equipment. DETAILED DESCRIPTION - A carbon-based flexible pressure sensor has a four-layer film structure including a flexible polyimide film layer, a silver electrode layer, a flexible graphene and graphene oxide composite thin film layer and a graphene oxide thin film insulating protective layer. The polyimide film layer has a thickness of 20-200 mu m. The silver electrode layer has a thickness of 500 nm to 5 mu m, is formed on the polyimide film layer. The flexible graphene and graphene oxide composite thin film layer has a thickness of 50-600 mu m and a honeycomb porous layered structure. The graphene oxide thin film insulating protective layer has a thickness of 20-300 mu m. The flexible graphene and graphene oxide composite thin film layer and graphene oxide thin film insulating protective layer are grown together and are bonded together with the silver electrode layer. An INDEPENDENT CLAIM is included for a method of manufacturing the pressure sensor.