• 专利标题:   Forming material on graphene layer structure for use in electronic component for biosensing, involves providing graphene layer structure having first portions on non-metallic substrate, and plasma etching first portions of graphene layer structure to remove the out-of-plane material.
  • 专利号:   US2022178872-A1, GB2601775-A, GB2601775-B
  • 发明人:   GUINEY I, THOMAS S, GLASS H, LEE L Y
  • 专利权人:   PARAGRAF LTD, PARAGRAF LTD
  • 国际专利分类:   G01N027/414, H01L021/3065, H01L029/16, H01L029/66, H01L021/04
  • 专利详细信息:   US2022178872-A1 09 Jun 2022 G01N-027/414 202252 English
  • 申请详细信息:   US2022178872-A1 US533540 23 Nov 2021
  • 优先权号:   GB019412

▎ 摘  要

NOVELTY - Forming a material involves providing a graphene layer structure having first portions on a non-metallic substrate. The first portions having surface defects comprise excess out-of-plane material. The first portions of the graphene layer structure are plasma etched to remove the out-of-plane material. A material is deposited for injecting charge into, or extracting charge out of, the graphene layer structure onto the plasma-etched first portions. USE - Method for forming a material on a graphene layer structure for injecting charge into, or extracting charge out of, the layer structure, and for use in an electronic component for biosensing. ADVANTAGE - The method provides improved electrical connections on a graphene sheet material, very high quality graphene with a reduced number of defects, excellent electrical, thermal and mechanical properties, and has lower cost. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an electronic component, which comprises a graphene layer structure on a substrate, the graphene layer structure having a substantially continuous surface, the surface having metal contacts, each on portions of surface, where each portion of the surface having a metal contact has a flat planar surface and surface discontinuities, where the metal contact lies across and within the surface discontinuities.