▎ 摘　　要

NOVELTY - The method involves calculating thickness of an epitaxial graphene sample pyrolysis silicon face. A sample is detected by using an X-ray photoelectron spectroscopy. Sample scanning range is about 280-290eV. Different photon diffraction receiving angle is selected. Photon integration strength is calculated. Electron and photon diffraction integral intensities are calculated. Graphene sample thickness is calculated. Layer data of the graphite sample is obtained. Incidence angle of f X-ray is about 45 degrees. USE - Carbonizing silicon substrate graphite alkene layer number testing method. ADVANTAGE - The method enables improving measuring accuracy and non-destructive testing accuracy. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a carbonizing silicon substrate. '(Drawing includes non-English language text)'