• 专利标题:   Electronic device e.g. electronic apparatus, has island-like insulating film that is provided to cover second region which is adjacent to second surface of graphene in first region covered with first electrode.
  • 专利号:   JP2022115197-A
  • 发明人:   ASO H, KONDO O, HAYASHI K, SUDA S
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   H01L021/28, H01L029/417, H01L031/08, H01L051/05, H01L051/30
  • 专利详细信息:   JP2022115197-A 09 Aug 2022 H01L-021/28 202268 Pages: 51 Japanese
  • 申请详细信息:   JP2022115197-A JP011698 28 Jan 2021
  • 优先权号:   JP011698

▎ 摘  要

NOVELTY - The electronic device (1A) has a graphene (20) that is provided on a surface (10a) of substrate (10). An island-like insulating film (50) is provided in an area to be adjacent in the regions (21, 22). The electronic device main portion covers the graphene provided in the substrate with the insulating film and forms an opening communicating with the regions to form electrodes (30,40). The graphene is brought into contact with the resist, and the resist residue is restrained from being interposed between the graphene and the electrodes. An insulating film is formed on a second surface opposite to the substrate. A first opening communicating with the insulating film region of the second surface of the graphene is formed. USE - Electronic device e.g. personal computer. Uses include but are not limited to supercomputer, server, smartphone, mobile phone, tablet terminal, sensor, camera and audio equipment. ADVANTAGE - The device with a connection between a graphene and an electrode with high contact resistance is suppressed. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method of the electronic apparatus. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the electronic device. Electronic device (1A) Substrate (10) Surface (10a) Graphene (20) Regions (21,22) Electrodes (30,40) Island-like insulating film (50)