• 专利标题:   Low-refractive index difference waveguide graphene modulator, has insulating medium layer provided with monolayer graphene thin film, and high-refractive index silicon oxide layer provided with insulating medium layer.
  • 专利号:   CN103439807-A
  • 发明人:   LI B, YANG X, LV Q, CUI R, YIN W, HAN Q
  • 专利权人:   INST SEMICONDUCTORS CHINESE ACAD SCI
  • 国际专利分类:   G02F001/025
  • 专利详细信息:   CN103439807-A 11 Dec 2013 G02F-001/025 201412 Pages: 9 Chinese
  • 申请详细信息:   CN103439807-A CN10380432 28 Aug 2013
  • 优先权号:   CN10380432

▎ 摘  要

NOVELTY - The modulator has a lower cladding layer formed on a substrate. A waveguide core layer and the lower cladding layer are attached together to form a ridge structure. An ITO transparent electrode is fixed on the waveguide core layer. A cover is exposed at surface of the lower cladding layer. A lower insulating medium layer is provided with the ITO transparent electrode. The insulating medium layer is provided with a monolayer graphene thin film. A high-refractive index silicon oxide layer is provided with the insulating medium layer. USE - Low refractive index difference waveguide graphene modulator. ADVANTAGE - The modulator has small volume, wide bandwidth, small insertion loss and simple technique. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a low-refractive index difference waveguide graphene modulator preparing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a low-refractive index difference waveguide graphene modulator.