• 专利标题:   Terahertz modulator based graphene-metal composite structure has microstructure layer that is set inside graphene microstructure layer, to form active region structure whose top is set with metal layer, for forming metal electrodes.
  • 专利号:   CN106449381-A, CN106449381-B
  • 发明人:   HE X, LIU F, LIN F
  • 专利权人:   UNIV SHANGHAI NORMAL
  • 国际专利分类:   G02F001/015, H01L021/20, H01L021/265
  • 专利详细信息:   CN106449381-A 22 Feb 2017 H01L-021/20 201721 Pages: 16 Chinese
  • 申请详细信息:   CN106449381-A CN10654214 11 Aug 2016
  • 优先权号:   CN10654214

▎ 摘  要

NOVELTY - The composite structure has a doped semiconductor epitaxial layer (03) that is formed on polymer flexible substrate layer (02). A bottom of aluminum oxide insulating-active zone structure is provided with aluminum oxide insulating layer (04) which is mounted with graphene microstructure layer (05) and a metal microstructure layer (06). The metal microstructure layer is arranged inside graphene microstructure layer at specific intervals, to form active region structure. A metal layer is deposited on top of active region structure, for forming upper metal electrodes. USE - Terahertz modulator based graphene-metal composite structure. ADVANTAGE - The effective adjustment of the terahertz wave can be realized. The high quality factor of the modulator and good adjustable performance and larger modulation depth can be achieved. DETAILED DESCRIPTION - The Terahertz modulator back electrode and aluminum oxide insulation-active zone structure composite layer are formed on the doped semiconductor epitaxial layer. An INDEPENDENT CLAIM is included for a preparation method of graphene-metal composite structure. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic circuit diagram of graphene-metal composite structure. (Drawing includes non-English language text) Polymer flexible substrate layer (02) Doped semiconductor epitaxial layer (03) Aluminum oxide insulating layer (04) Graphene layer structure (05) Metal micro-structure layer (06)