• 专利标题:   Metasurface element for electron tube, has metal layer that extends beyond metal pattern to reach region on surface of support portion, and region is not formed with metal pattern.
  • 专利号:   WO2022102268-A1, EP4002418-A1
  • 发明人:   NAOYA K, HIDEAKI Y, YUYA S, GENKI N, KAWAI N, YOSHIARA H, SUZUKI Y, NAKAGOMI G
  • 专利权人:   HAMAMATSU PHOTONICS KK, HAMAMATSU PHOTONICS KK
  • 国际专利分类:   G01J005/08, G01N021/3581, H01J001/34, H01J043/08, H01J009/12
  • 专利详细信息:   WO2022102268-A1 19 May 2022 202243 Pages: 36 English
  • 申请详细信息:   WO2022102268-A1 WOJP035720 28 Sep 2021
  • 优先权号:   EP207267

▎ 摘  要

NOVELTY - The element (20) has a support portion (21), and a metasurface (22) is formed on a surface of the support portion. The metasurface includes a metal pattern (24) is mounted to emit an electron in response to incidence of an electromagnetic wave. A metal layer (25) contains an alkali metal and is formed on the metal pattern. The metal layer extends beyond the metal pattern to reach a region on the surface of the support portion, the region not formed with the metal pattern. The support portion is made of silicon, quartz, sapphire, or zinc selenide. A material of the metal pattern includes gold, platinum, aluminum, graphene, silver, or copper. USE - Metasurface element for electron tube (claimed). ADVANTAGE - The resistance value of the surface of the support portion can be reduced, and the occurrence of charge-up on the metal pattern can be suppressed. The probability of tunneling can be increased and the sensitivity can be improved. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) an electron tube; and (2) a method for producing an electron tube. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the holding unit. Metasurface element (20) Support portion (21) Metasurface (22) Metal pattern (24) Metal layer (25)