▎ 摘　　要

NOVELTY - A pellicle comprises a pellicle layer having a yttrium compound-containing layer containing a yttrium compound. The yttrium compound includes yttrium trifluoride, yttrium nitride, yttrium oxynitride, yttrium aluminum garnet, monoclinic yttrium aluminate, yttrium aluminum perovskite, yttrium oxyfluoride, yttrium oxycarbide, yttrium orthosilicate or yttrium silicon oxide. USE - Pellicle used in extreme UV exposure device for use in semiconductor device and electronic device. ADVANTAGE - The pellicle has excellent mechanical strength, chemical resistance, thermal stability, mechanical stability and chemical durability, and high extreme UV transmittance of 85% or more. DETAILED DESCRIPTION - A pellicle comprises a pellicle layer having a yttrium compound-containing layer containing a yttrium compound. The yttrium compound includes yttrium trifluoride, yttrium nitride, yttrium oxynitride, yttrium aluminum garnet (Y3Al5O12), monoclinic yttrium aluminate (Y4Al2O9), yttrium aluminum perovskite (YAlO3), yttrium oxyfluoride, yttrium oxycarbide (Y2OC), yttrium orthosilicate (Y2SiO5) or yttrium silicate (Y2Si3O9).