• 专利标题:   Graphene-containing electrode material preparation method for phase change memory, involves utilizing chemical dispersion process to prepare graphene nano material, and forming prepared graphene nano material into single layer graphene.
  • 专利号:   CN102610753-A, CN102610753-B
  • 发明人:   LV S, SONG Z
  • 专利权人:   CHINESE ACAD SCI SHANGHAI MICROSYSTEM, SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   H01L045/00
  • 专利详细信息:   CN102610753-A 25 Jul 2012 H01L-045/00 201266 Pages: 14 Chinese
  • 申请详细信息:   CN102610753-A CN10093595 31 Mar 2012
  • 优先权号:   CN10093595

▎ 摘  要

NOVELTY - The method involves providing a silicon wafer substrate, where the silicon wafer substrate is made of ammonia water, hydrochloric acid, hydrogen peroxide, and de-ionized water. The silicon wafer substrate is cleaned, where thickness of a dielectric layer of the substrate is 300 to 500 nm. A chemical dispersion process is utilized to prepare a graphene nano material. The prepared graphene nano material is formed into a single layer graphene, where the thickness of the single layer graphene is 200 nm. USE - Graphene-containing electrode material preparation method for a phase change memory. ADVANTAGE - The method enables reducing contact area so as to reduce device operation current and power consumption. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a graphene-containing electrode material.