• 专利标题:   Method for preparing groove structure of graphene channel transistor, involves using sides of graphene thin film as source electrode and drain electrode, and making conductive material using metal, semiconductor or polymer material.
  • 专利号:   CN103594378-A, CN103594378-B
  • 发明人:   XIONG J, XUE C, LIU J, ZHANG W, GAO L, WANG Y, LIU Y
  • 专利权人:   UNIV NORTH CHINA
  • 国际专利分类:   H01L021/336
  • 专利详细信息:   CN103594378-A 19 Feb 2014 H01L-021/336 201427 Pages: 11 Chinese
  • 申请详细信息:   CN103594378-A CN10593276 23 Nov 2013
  • 优先权号:   CN10593276

▎ 摘  要

NOVELTY - The method involves etching a groove (102) on a substrate (101). The grooves are etched with a connecting groove. The groove on the substrate surface of upper transfer layer is completely covered by a graphene thin film (105). An air space is located in the groove on the graphene thin film. The sides of the graphene thin film are deposited with layer of conductive material. The sides of the graphene thin film are used as a source electrode (106) and a drain electrode (107). The conductive material is made of metal, semiconductor or polymer material. USE - Method for preparing groove structure of graphene channel transistor. ADVANTAGE - Since the graphene trench of the substrate is avoided, the performance of graphene transistor is improved. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating the process for preparing groove structure of graphene channel transistor. Substrate (101) Groove (102) Graphene thin film (105) Source electrode (106) Drain electrode (107)