• 专利标题:   Production of graphene-based film-type hydrogen gas sensor, by preparing contact electrode on substrate having graphene film, loading catalytic metal particles onto graphene film by photolithography and lifting-off.
  • 专利号:   CN108548852-A
  • 发明人:   YANG Q, TIAN L
  • 专利权人:   BEIJING LEIPENG TECHNOLOGY CO LTD
  • 国际专利分类:   G01N027/12
  • 专利详细信息:   CN108548852-A 18 Sep 2018 G01N-027/12 201873 Pages: 7 Chinese
  • 申请详细信息:   CN108548852-A CN10678756 27 Jun 2018
  • 优先权号:   CN10678756

▎ 摘  要

NOVELTY - Production of graphene-based film-type hydrogen gas sensor involves preparing contact electrode on substrate having graphene film, removing graphene film other than region surrounded by the two contact electrodes, loading catalytic metal particles onto the graphene film by a photolithography and lifting-off process to obtain hydrogen-sensitive resistive unit having discrete distribution and size of 1-10 nm. USE - Production of graphene-based film-type hydrogen gas sensor. ADVANTAGE - The method enables simple, rapid, energy-efficient and economical production of graphene-based film-type hydrogen gas sensor with high selectivity and sensitivity, and stable quality. The hydrogen gas sensor detects hydrogen having volume concentration is 0.0001-100%. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for graphene-based film-type hydrogen gas sensor produced by the method.