• 专利标题:   Circuit apparatus for e.g. electronic integrated circuit device, comprises graphene film which consists of several layers, metal electrode directly joined to graphene film, and another metal electrode directly joined to graphene film.
  • 专利号:   JP2012138451-A, JP5629570-B2
  • 发明人:   OKAI M, HIROKA M, WADA Y
  • 专利权人:   HITACHI LTD, HITACHI LTD
  • 国际专利分类:   C01B031/02, H01L021/336, H01L029/786
  • 专利详细信息:   JP2012138451-A 19 Jul 2012 H01L-029/786 201249 Pages: 13 Japanese
  • 申请详细信息:   JP2012138451-A JP289350 27 Dec 2010
  • 优先权号:   JP289350

▎ 摘  要

NOVELTY - A circuit apparatus comprises a graphene film which consists of several layers, metal electrode (203) directly joined to the graphene film, and a metal electrode (204) directly joined to the graphene film. The graphene film has conductive-type doped regions formed between the metal electrode (203) and metal electrode (204). Where, 90% or more of region of the graphene film in the region joined to the metal electrode (203) and 90% or more of region of the graphene film in the region joined to the metal electrode (204) is doped by conductive-type dopant. USE - Circuit apparatus is used for electronic integrated circuit device and electronic/optical integrated circuit apparatus (all claimed). ADVANTAGE - The contact resistance between the electrical joining of the graphene film and metal electrode in circuit apparatus is reduced. DESCRIPTION OF DRAWING(S) - The drawing shows the structure of circuit apparatus. Graphene channels (201,207) Gate insulating layer (202) Metal electrodes (203,204) Gate electrode (205) Source electrode (206)