• 专利标题:   Fabricating structure comprising graphene sheet equipped with metal pads, comprises synthesizing graphene sheet on many metal pads that are laid on membrane of dielectric material, and optionally eliminating the membrane.
  • 专利号:   EP2409951-A1, FR2962995-A1, JP2012025652-A, US2012040145-A1, FR2962995-B1, US8999440-B2, EP2409951-B1
  • 发明人:   ZENASNI A, CORAUX J, IVANOVAHRISTOVA V, LANDIS S, PERNEL C
  • 专利权人:   COMMISSARIAT ENERGIE ATOMIQUE, CENT NAT RECH SCI, COMMISSARIAT ENERGIE ATOMIQUE, CENT NAT RECH SCI, COMMISSARIAT ENERGIE ATOMIQUE AUX ENER, CENT NAT RECH SCI, CENT NAT RECH SCI, COMMISSARIAT ENERGIE ATOMIQUE
  • 国际专利分类:   C01B031/04, C01B031/02, H01L021/786, B82B001/00, B82B003/00, B82Y030/00, B82Y040/00, B23P019/00, B32B003/30, C23C016/26, C25B009/00, H01L031/02, B81C001/00, H01B001/04, H01L029/16, H01M010/04, H01M004/139, H01M004/583
  • 专利详细信息:   EP2409951-A1 25 Jan 2012 C01B-031/04 201210 Pages: 14 French
  • 申请详细信息:   EP2409951-A1 EP173602 12 Jul 2011
  • 优先权号:   FR055937

▎ 摘  要

NOVELTY - The process of fabricating a structure (10) comprising a graphene sheet (11) equipped with metal pads (12) over one of its faces, where the pads are separated from each other by a dielectric medium chosen from the air and dielectric materials, comprises synthesizing the graphene sheet on many metal pads that are laid on a membrane of a dielectric material or integrated into the membrane by catalytic growth in vapor phase, and optionally eliminating the membrane. The catalytic growth of graphene is carried out by chemical vapor deposition using a gas stream. USE - The process is useful for fabricating a structure comprising a graphene sheet for the fabrication of micro-and nanoelectronic devices, micro-or nanoelectromechanical devices, spintronic devices, photovoltaic devices or LED displays (claimed). ADVANTAGE - The process is capable of economically and easily fabricating the structure comprising the graphene sheet with high quality on an industrial scale thus improving the electromechanical properties of the photovoltaic devices. DETAILED DESCRIPTION - The process of fabricating a structure (10) comprising a graphene sheet (11) equipped with metal pads (12) over one of its faces, where the pads are separated from each other by a dielectric medium chosen from the air and dielectric materials, comprises synthesizing the graphene sheet on many metal pads that are laid on a membrane of a dielectric material or integrated into the membrane by catalytic growth in vapor phase, and optionally eliminating the membrane. The catalytic growth of graphene is carried out by chemical vapor deposition using a gas stream comprising optionally 1-3C and 1-2C hydrocarbons by mixing with hydrogen or a hydrogen compound and/or inert gases at a temperature of 800-1200 degrees C and a pressure less than atmospheric pressure but greater than 10-6 Pa. The metal pads are constituted of a metal or a mixture of metals of which the lattice parameter does not differ more than 2% of the graphene, and form a non-regular network. The largest area of the metal pads is measured in nanoscale in a direction parallel to the plane of the membrane dielectric. The distance between two adjacent metal pads has nanoscale dimension. The process further comprises preparing the metal pads, and filling of openings that comprises a support with a metal or its alloy, where the openings of the support form a non-regular network. The support is constituted by the membrane of dielectric material, and in that the openings of the support correspond to the pores that comprise the membrane before filling of the openings by the metal or its alloy. An INDEPENDENT CLAIM is included for a structure comprising a graphene sheet. DESCRIPTION OF DRAWING(S) - The diagram shows a schematic view of a process for fabricating a structure comprising a graphene sheet. Structure (10) Graphene sheet (11) Metal pads. (12)