• 专利标题:   Graphene-semiconductor hetero-junction photodetector for performing photodetection function, has drain electrode that is formed in direction perpendicular to direction in which source electrode is connected to graphene layer.
  • 专利号:   US2020350443-A1, KR2020127778-A, KR2020127775-A
  • 发明人:   LEE B H, CHANG K E
  • 专利权人:   GWANGJU INST SCI TECHNOLOGY, GWANGJU INST SCI TECHNOLOGY
  • 国际专利分类:   H01L031/0216, H01L031/0224, H01L031/028, H01L031/113, H01L031/18, H01L027/144, H01L031/032, H01L031/072, H01L031/10, H01L029/16, H01L029/205, H01L029/66, H01L029/737, H01L031/0256
  • 专利详细信息:   US2020350443-A1 05 Nov 2020 H01L-031/0216 202093 Pages: 29 English
  • 申请详细信息:   US2020350443-A1 US864077 30 Apr 2020
  • 优先权号:   KR052549, KR052555

▎ 摘  要

NOVELTY - The photodetector has an insulating layer that is formed on a substrate (10). A graphene layer (20) is formed to extend from the substrate to the insulating layer. A source electrode (40) is formed on the insulating layer at one end of the extended graphene layer. A drain electrode (50) is formed on the substrate. A gate insulating layer is formed on the graphene layer. A gate electrode (60) is formed on the gate insulating layer and includes light transmittance. The drain electrode is physically separated from the graphene layer and is formed in a direction perpendicular to a direction in which the source electrode is connected to the graphene layer. USE - Graphene-semiconductor hetero-junction photodetector for performing photodetection function in high illuminance environment. ADVANTAGE - The photodetector adjusts gain according to an applied gate voltage and improves photodetection efficiency by decreasing a dark current. The photoresponsivity is improved or the photoresponsivity is controlled. The probability that the holes generated in the substrate move to the graphene layer is reduced due to the increase in the Fermi level. The dark current decreases by inserting the intermediate layer between the substrate and the graphene layer. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing graphene-semiconductor hetero-junction photodetector. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a photodetector. Substrate (10) Graphene layer (20) Source electrode (40) Drain electrode (50) Gate electrode (60)