• 专利标题:   Liquid jet head for inkjet printer, has diaphragm having amorphous layer and carbon layer containing diamond-like carbon, graphene and carbon nanotube laminated sequentially.
  • 专利号:   JP2022057159-A
  • 发明人:   TONOMURA O, KOIKE H, YAMAZAKI Y, NAKAYAMA M, SUGIYAMA T
  • 专利权人:   SEIKO EPSON CORP
  • 国际专利分类:   B41J002/14, B41J002/16, H01L041/053, H01L041/09, H01L041/319
  • 专利详细信息:   JP2022057159-A 11 Apr 2022 B41J-002/14 202241 Pages: 27 Japanese
  • 申请详细信息:   JP2022057159-A JP165271 30 Sep 2020
  • 优先权号:   JP165271

▎ 摘  要

NOVELTY - The liquid ejection head has first electrodes (341) that are arranged in order from the diaphragm (33). The piezoelectric element (34) includes a piezoelectric layer (343) and a second electrode (342). A protective film (43) is provided in contact with a portion of the diaphragm and the wall. The 90% of the thickness of the diaphragm includes a first amorphous layer (330) in which a first layer and a second layer are laminated, or a second amorphous layer and a metal layer are provided. A second amorphous layer and a metal layer are laminated. A third amorphous layer and a carbon layer comprising a diamond-like carbon, a graphene and a carbon nanotube are laminated. USE - Liquid ejection head of serial type liquid ejection device. ADVANTAGE - The liquid ejection head has excellent discharge performance. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a liquid ejection head of liquid ejection device. Diaphragm (33) Piezoelectric element (34) Protective film (43) First amorphous layer (330) First electrodes (341) Second electrode (342) Piezoelectric layer (343)