• 专利标题:   Thin film transistor preparation method for array substrate of display device, involves forming source and drain metal layer on graphene semiconductor layer, and forming laminated structure on base plate.
  • 专利号:   CN104485363-A
  • 发明人:   CAO Z, HE X, KONG X, YAO Q, ZHANG F, ZHANG B, GAO J, LI Z
  • 专利权人:   BOE TECHNOLOGY GROUP CO LTD
  • 国际专利分类:   H01L021/336, H01L021/77, H01L027/02, H01L029/786
  • 专利详细信息:   CN104485363-A 01 Apr 2015 H01L-029/786 201538 Pages: 17 Chinese
  • 申请详细信息:   CN104485363-A CN10841859 30 Dec 2014
  • 优先权号:   CN10841859

▎ 摘  要

NOVELTY - The method involves forming source and drain metal layer on a graphene semiconductor layer, and forming a laminated structure on a base plate. The laminated structure is used to carry out a quadratic patterning process. A graphene semiconductor active layer is formed, and a source-drain metal pattern layer is formed on a relative area between a source electrode and a drain electrode. The source and drain metal layer is composed of copper or copper-containing alloy. A doping element of the semiconductor layer is composed of hydrogen, fluorin, nitrogen, oxygen, boron and bromine. USE - Method for preparation of a thin film transistor of an array substrate for a display device (all claimed). ADVANTAGE - The method enables preventing the graphene semiconductor layer from being polluted and improving electrical performance. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a display device comprising an array substrate DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for preparation of a thin film transistor of an array substrate. '(Drawing includes non-English language text)'