• 专利标题:   Graphene resonator, has acoustic wave generator whose surface is provided with substrate, and hanging graphene formed under machine vibration, where surface of substrate is formed with groove.
  • 专利号:   CN104716924-A, CN104716924-B
  • 发明人:   FAN Y, HUANG Z, LIU Z, XU G, XU K, ZHONG H
  • 专利权人:   CHINESE ACAD SCI SUZHOU NANOTECH, CHINESE ACAD SCI SUZHOU NANOTECH NANO
  • 国际专利分类:   H03H003/02, H03H009/15
  • 专利详细信息:   CN104716924-A 17 Jun 2015 H03H-009/15 201560 Pages: 7 Chinese
  • 申请详细信息:   CN104716924-A CN10668842 11 Dec 2013
  • 优先权号:   CN10668842

▎ 摘  要

NOVELTY - The resonator has an acoustic wave generator whose surface is provided with a substrate. A surface of the substrate is formed with a groove A hanging graphene is formed under machine vibration. The substrate is made of a piezoelectric crystal. The acoustic wave generator is fixed with a transducer. The piezoelectric crystal is made of lithium niobate. The hanging graphene is formed with atom layer graphene, multi-atom layer graphene and an oxidation layer. The graphene is provided with a P-type/N-type doping material. USE - Graphene resonator. ADVANTAGE - The resonator is easy to implement. The resonator is provided with a small pressure sensor so as to improve micro-electromechanical system quality detecting performance. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene resonator manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a graphene resonator.