• 专利标题:   Method of forming graphene device, involves patterning protection layer and seed layer to form protection pattern and seed pattern with respective lengths in respective directions.
  • 专利号:   US2012168723-A1, KR2012076297-A
  • 发明人:   PARK K
  • 专利权人:   ELECTRONICS TELECOM RES INST, ELECTRONICS TELECOM RES INST
  • 国际专利分类:   B82Y040/00, H01L021/20, H01L029/16, C01B031/02, H01L021/336, H01L029/78
  • 专利详细信息:   US2012168723-A1 05 Jul 2012 H01L-029/16 201246 Pages: 21 English
  • 申请详细信息:   US2012168723-A1 US335709 22 Dec 2011
  • 优先权号:   KR138022, KR115828

▎ 摘  要

NOVELTY - The method involves sequentially forming seed layer and protection layer on substrate (20). The protection layer and seed layer are patterned to form protection patterns (23,25) and seed patterns (22a,22b) with respective lengths in respective directions. Length is lesser than other length. USE - Method of forming graphene device (claimed). ADVANTAGE - The graphene layer can be directly applied to the device without use of any separation process and transferring process of graphene layer. The graphene device can be formed with simple manufacturing process. Sine the transferring process is omitted, the fabrication process of graphene layer can be simplified, and hence the damage to the graphene layer can be prevented. Since the electrical conductivity of the graphene layer is achieved, the performance and the reliable electronic device of graphene layer can be improved effectively. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for graphene device. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the graphene device. Substrate (20) Insulation layer (21) Seed patterns (22a,22b) Protection patterns (23,25) Graphene layer (24)