▎ 摘　　要

NOVELTY - The utility model claims a composite base system, comprising: a first base, a heat conducting part, a second base and a radio frequency heating coil; wherein the top surface of the first base is provided with a substrate slot, the heat conducting part is located below the first base, the second base is located below the heat conducting part, the second base comprises a top surface and a bottom surface opposite to each other, the top surface of the second base is provided with a groove, the cross section area of the second base is greater than the cross section area of the first base, The radio frequency heating coil is coaxially surrounded around the second base. The utility model uses the composite base, wherein the graphene heat conducting part can better control the temperature distribution of the first base, the heat of the first base is derived from the second base, which can reduce the effect of skin effect on the first base heating, and reduce the energy consumption.