• 专利标题:   Optical detector for use in remote sensing, has first electrode and second electrode that are respectively set in paired electrode holes, and electrically connected with graphene layer.
  • 专利号:   CN113972295-A, CN113972295-B
  • 发明人:   XIE C, XU G, WAN F, XU C, CONG H, WANG X, XUE C
  • 专利权人:   INST SEMICONDUCTORS CHINESE ACAD SCI
  • 国际专利分类:   H01L031/0216, H01L031/09, H01L031/18
  • 专利详细信息:   CN113972295-A 25 Jan 2022 H01L-031/09 202219 Chinese
  • 申请详细信息:   CN113972295-A CN11239248 25 Oct 2021
  • 优先权号:   CN11239248

▎ 摘  要

NOVELTY - The detector has a substrate (100). A silicon dioxide layer (200) is covered on the substrate. A ridge waveguide structure is fixed on the silicone layer. A first silicon nitride layer (300) is arranged on the silica layer. The graphene layer (400) is disposed on the first silicon nitride layer. An insulating layer (500) is set on the graphene layer, where the insulation layer is provided with at least one pair of electrode holes. A second silicon nitrate layer (700) is placed on the insulator layer, and is located between the pair of the electrode holes to protrude relative to the insulated layer to form a ridge-shaped portion. The first electrode (610) and the second electrode (620) are respectively arranged in the paired electrode holes, and are electrically connected with the graphene layer. USE - Optical detector. Uses include but are not limited to remote sensing, imaging, communication, night vision, biological medicine, environment monitoring and parameter measurement. ADVANTAGE - The detector realizes light detection of wide spectrum, thus enhancing light detector response degree. The detector utilizes a silicon sheet to transfer the graphene and polymethyl methacrylate film from ferric chloride solution to de-ionized water to remove ferrous chloride solution, so that de-ionized water can be replaced to remove residual ferric chloride solution in effective manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a preparation method of optical detector. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of the optical detector. Substrate (100) Silicon dioxide layer (200) First silicon nitride layer (300) Graphene layer (400) Insulating layer (500) First electrode (610) Second electrode (620) Second silicon nitrate layer (700)