• 专利标题:   Composite used for electrode of transistor used in flexible device, consists of single crystal sapphire substrate having dislocation density less than preset value, metal film grown on substrate, and graphene film grown on metal film.
  • 专利号:   JP2017043841-A
  • 发明人:   AOTA N, AIDA H
  • 专利权人:   NAMIKI SEIMITSU HOSEKI KK
  • 国际专利分类:   C01B032/15, C01B032/18, C01B032/182, C23C014/14, C23C016/02, C23C016/26, C30B025/18, C30B029/02
  • 专利详细信息:   JP2017043841-A 02 Mar 2017 C23C-016/26 201719 Pages: 7 Japanese
  • 申请详细信息:   JP2017043841-A JP161721 22 Aug 2016
  • 优先权号:   JP166436

▎ 摘  要

NOVELTY - A composite consists of a single crystal sapphire substrate having a dislocation density of less than 108/cm2, a metal film grown on the substrate, and a graphene film grown on the metal film. USE - Composite is used for electrode of transistor used in flexible device. ADVANTAGE - The composite has reduced dislocation density, controlled lamination number of layers, and suppressed generation of defects in the graphene film, and pit or abnormal growth in graphene film by dislocation. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) manufacture of composite, which involves preparing the sapphire substrate, epitaxially growing the metal film on the sapphire substrate, and epitaxially growing the graphene film on the metal film; (2) graphene film, which is obtained by peeling from the composite; and (3) manufacture of graphene film.