• 专利标题:   Graphene deposition device comprises e.g. transfer unit for selectively transferring substrate from titanium deposition unit to multiple of graphene forming units for receiving substrate and forming graphene layer on titanium layer.
  • 专利号:   KR2021119264-A, KR2438664-B1
  • 发明人:   YOUN D H, GYU S, KANG J
  • 专利权人:   KUK IL GRAPHENE CO LTD
  • 国际专利分类:   B01J019/00, C01B032/186
  • 专利详细信息:   KR2021119264-A 05 Oct 2021 C01B-032/186 202186 Pages: 15
  • 申请详细信息:   KR2021119264-A KR139466 26 Oct 2020
  • 优先权号:   KR034993

▎ 摘  要

NOVELTY - Graphene deposition device (100) comprises a titanium deposition unit (110) for depositing a titanium layer on one surface of the substrate; a multiple of graphene forming units (121-126) receiving the substrate and forming a graphene layer on the titanium layer; and a transfer unit (130) for selectively transferring the substrate from the titanium deposition unit to the multiple of graphene forming units, where the process of the titanium deposition unit is made shorter in time than the process of the graphene forming unit, and a multiple of the graphene forming units are formed for dividing and supplying the substrate discharged from the titanium deposition unit into a multiple of graphene forming units in turn according to the temporal progression order, and the transfer unit is set in a temporal progression sequence. A vibrating unit is connected to mesh structure of gate valve and generating vibration to remove carbon particles from mesh structure. USE - Used as graphene deposition device. ADVANTAGE - The device improves productivity of high-quality graphene by reducing the process time by dividing the graphene synthesis into a multiple of chambers. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the graphene deposition device. Graphene deposition device (100) Titanium deposition unit (110) Graphene forming units (121-126) Transfer unit (130)