• 专利标题:   Manufacture of graphene for fabricating graphene semiconductor device, involves contacting reaction gas for graphene growth on substrate surface, heating substrate, and growing graphene.
  • 专利号:   WO2012036537-A2, KR2012029684-A, KR2012053489-A, WO2012036537-A3, KR1198482-B1, KR2013006944-A, KR1260606-B1
  • 发明人:   LEE K, CHOI I, LEE K J, CHOI I S, JAE L G, SEONG C I
  • 专利权人:   KOREA ADV INST SCI TECHNOLOGY
  • 国际专利分类:   B01J019/08, C01B031/02, C23C016/26, H01L021/268, C01B003/00, H01L021/331
  • 专利详细信息:   WO2012036537-A2 22 Mar 2012 C01B-031/02 201226 Pages: 33
  • 申请详细信息:   WO2012036537-A2 WOKR006917 19 Sep 2011
  • 优先权号:   KR091640, KR006115, KR062484, KR043977

▎ 摘  要

NOVELTY - A reaction gas for graphene growth is contacted on a substrate (10) surface. The substrate is heated by the light irradiated from flash lamp and graphene is grown on the substrate. USE - Manufacture of graphene for fabricating graphene semiconductor device (claimed). ADVANTAGE - The graphene is manufactured economically and the graphene semiconductor device is manufactured with improved productivity without mechanical deformation of graphene. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) graphene semiconductor device fabricating method, which involves forming graphene layer and patterning the formed layer; and (2) graphene manufacturing apparatus, which consists of chamber for accommodating the substrate, unit (20) for supplying the reaction gas, vacuum portion and light source (40) for irradiating light on the substrate. DESCRIPTION OF DRAWING(S) - The drawing shows the structure of the graphene manufacturing device. Substrate (10) Unit for supplying reaction gas (20) Light source (40) Reflective unit (50) Roll (60)