• 专利标题:   Graphene metal contact removing method, involves coating spin in optical resist layer, forming metal electrode with image in inorganic layer surface, and providing graphene-metal contact area with inorganic layer.
  • 专利号:   CN104465328-A
  • 发明人:   JIN Z, PENG S, WANG X, ZHANG D, WANG S, SHI J
  • 专利权人:   INST MICROELECTRONICS CHINESE ACAD SCI
  • 国际专利分类:   H01L021/02, H01L021/04
  • 专利详细信息:   CN104465328-A 25 Mar 2015 H01L-021/02 201534 Pages: 12 Chinese
  • 申请详细信息:   CN104465328-A CN10763701 11 Dec 2014
  • 优先权号:   CN10763701

▎ 摘  要

NOVELTY - The method involves assembling an organic layer in a graphene surface. An inorganic layer is deposited in a double-layer protecting layer. A spin is coated in an optical resist layer. A metal electrode is formed with an image in the inorganic layer surface. A graphene-metal contact area is provided with the inorganic layer. An organic thin film is fixed in the graphene metal contact. A photoetching image is formed in a graphene field effect transistor. USE - Graphene metal contact removing method. ADVANTAGE - The method enables preventing damage of the graphene surface and reducing graphene doped degree, thus maintaining high carrier migration rate of the graphene field effect transistor and improving performance of the graphene material. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a graphene metal contact removing method. '(Drawing includes non-English language text)'