▎ 摘　　要

(CN217644616-U) NOVELTY - The utility model claims a fast response MEMS atomizing core, comprising a first substrate, a second substrate set on the top part of the first substrate, a sealing cavity set between the first substrate and the second substrate, silicon dioxide film respectively deposited on the top of the first substrate and the second substrate, a heating resistance wire set on the second substrate top part a protective layer silicon nitride for covering the heating resistance wire, a smoke oil absorbing material covered on the protective layer silicon nitride, a metal electrode set at the bottom of the second substrate and respectively connected with the heating resistance wire; The utility model is provided with a sealing cavity between the first substrate and the second substrate, which can reduce the heat conduction of heat downward, reduces the heat loss, improves the heating speed of the heating resistance wire, so as to improve the response time of the atomization of the smoke oil of the MEMS atomizing core under the same smoke oil atomizing temperature target. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for preparing the fast response micro-electromechanical systems (MEMS) atomizing core. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view taken along line A-A in top view after removing the smoke oil adsorption layer and the protective layer of silicon nitride. 1-1First substrate 1-2Second substrate 2-1First silicon dioxide film 2-2Second silicon dioxide film 3-1First metal electrode 3-2Second metal electrode 3-3Third metal electrode 3-4Fourth metal electrode 4Heating resistance wire 5Protective layer silicon nitride 6Smoke oil adsorption layer 100Sealing cavity