▎ 摘 要
NOVELTY - The apparatus (100) has a raw material fluid supplier (110) that supply the raw material fluid containing carbon to a gas jet unit. The gas jet unit is provided to thermally decompose the raw material fluid supplied from the fluid supplier, and spout the decomposed raw material fluid to the gas phase. A heater (150) is provided to heat a region of the catalyst substrate (120). The catalyst substrate is arranged to contact the gas gushing out from the gas jet unit. The raw material fluid is contained with inert gas and hydrogen gas. USE - Apparatus for manufacturing graphene film. ADVANTAGE - The graphene film can be easily manufactured. The property of the graphene film is imporved. The leakage of the gas to the housing is prevented. The time required for manufacturing the graphene film is reduced. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for method for manufacturing graphene film. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the apparatus for manufacturing graphene film. Apparatus for manufacturing graphene film (100) Raw material fluid supplier (110) Catalyst substrate (120) Heater (150) Roller (170)