• 专利标题:   Transfer method of graphene film involves depositing graphene thin film on metal substrate by chemical vapor deposition method, bonding transfer substrate using heat-peelable adhesive, and etching metal substrate.
  • 专利号:   CN103935988-A, CN103935988-B
  • 发明人:   YANG J, LI H, TAN H, WANG W, QIU Y
  • 专利权人:   WUXI GEFEI ELECTRONIC THIN FILMS TECHNOL, WUXI GRAPHENE FILM CO LTD
  • 国际专利分类:   C01B031/04, C23C016/56
  • 专利详细信息:   CN103935988-A 23 Jul 2014 C01B-031/04 201468 Pages: 7 Chinese
  • 申请详细信息:   CN103935988-A CN10111360 24 Mar 2014
  • 优先权号:   CN10111360

▎ 摘  要

NOVELTY - Transfer method of graphene film involves depositing graphene thin film on a metal substrate by chemical vapor deposition method, bonding transfer substrate using heat-peelable adhesive, etching metal substrate, processing, obtaining transfer substrate/heat-peelable adhesive/graphene thin film semi-finished product, bonding target substrate on surface of the graphene thin film semi-finished product, processing at high temperature and pressure, peeling transfer substrate and obtaining target substrate/graphene film product. USE - Transfer method of graphene film (claimed). ADVANTAGE - The graphene film is efficiently and economically transferred to the target substrate, by simple process. The transferred graphene film has surface roughness of less than 1 mm.