• 专利标题:   Graphene encapsulated thin film transistor manufacturing method, involves manufacturing source electrode, drain electrode and grid electrode on graphene surface to obtain graphene encapsulated transistor.
  • 专利号:   CN110676169-A
  • 发明人:   GAO X, FENG Z, YU C, HE Z, LIU Q, GUO J, ZHOU C
  • 专利权人:   SAURER JIANGSU TEXTILE MACHINERY CO LTD
  • 国际专利分类:   H01L021/335, H01L029/16
  • 专利详细信息:   CN110676169-A 10 Jan 2020 H01L-021/335 202009 Pages: 15 Chinese
  • 申请详细信息:   CN110676169-A CN10837111 05 Sep 2019
  • 优先权号:   CN10837111

▎ 摘  要

NOVELTY - The method involves growing a hydrogen-boron nitride film to manufacture a hydrogen-boron nitride surface sample by performing photoresist on a preset substrate. The hydrogen-boron nitride surface sample is transferred by a thermal release tape after removing the preset substrate. The thermal release tape is removed to obtain graphene samples. Graphene sample etching process is performed. A source electrode, a drain electrode and a grid electrode on a graphene surface are manufactured to obtain a graphene encapsulated transistor. USE - Graphene encapsulated thin film transistor manufacturing method. ADVANTAGE - The method enables manufacturing the source electrode and the drain electrode in a horizontal plane electrode contact so as to reduce contact resistance and preparation difficulty of the graphene encapsulated transistor, thus improving finished product rate. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a graphene encapsulated thin film transistor manufacturing method. '(Drawing includes non-English language text)'